Numerical noise reduction via diffraction for surface profiling interferometry

Hidemitsu Toba; Shigeru Nakayama; Hideaki Homma; Takashi Gemma; Kiyoshi Uchikawa

doi:10.1117/12.888918

26 May 2011 Numerical noise reduction via diffraction for surface profiling interferometry

Hidemitsu Toba, Shigeru Nakayama, Hideaki Homma, Takashi Gemma, Kiyoshi Uchikawa

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821Q (2011) https://doi.org/10.1117/12.888918
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Phase profiles obtained by phase shifting interferometry often include undesirable concentric ripple-noises, like "bull's-eye patterns" which are caused by scattering from defects on surfaces of optical elements in interferometers. We propose a numerical technique for reducing these bull's-eye noises via numerical diffraction. This technique is applicable to phase data obtained from all types of interferometer, since it only needs the phase data itself. We experimentally demonstrate that this technique is effective in elimination of bull's-eye noises from interferometer data. This technique is applicable to the data obtained from digital holography as well.

Citation Download Citation

Hidemitsu Toba, Shigeru Nakayama, Hideaki Homma, Takashi Gemma, and Kiyoshi Uchikawa "Numerical noise reduction via diffraction for surface profiling interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821Q (26 May 2011); https://doi.org/10.1117/12.888918

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