Laser self-mixing sensor to monitor in situ the penetration depth during short pulse laser drilling of metal targets

Francesco P. Mezzapesa; Antonio Ancona; Teresa Sibillano; Francesco De Lucia; Maurizio Dabbicco; Pietro Mario Lugarà; Gaetano Scamarcio

doi:10.1117/12.898101

27 May 2011 Laser self-mixing sensor to monitor in situ the penetration depth during short pulse laser drilling of metal targets

Francesco P. Mezzapesa, Antonio Ancona, Teresa Sibillano, Francesco De Lucia, Maurizio Dabbicco, Pietro Mario Lugarà, Gaetano Scamarcio

Author Affiliations +

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 808245 (2011) https://doi.org/10.1117/12.898101
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Direct real-time measurements of the penetration depth during laser micromachining has been demonstrated by developing a novel ablation sensor based on laser diode feedback interferometry. Percussion drilling experiments have been performed by focusing a 120-ps pulsed fiber laser onto metallic targets with different thermal conductivity. In-situ monitoring of the material removal rate was achieved by coaxially aligning the beam probe with the ablating laser. The displacement of the ablation front was revealed with sub-micrometric resolution by analyzing the sawtooth-like induced modulation of the interferometric signal out of the detector system.

Citation Download Citation

Francesco P. Mezzapesa, Antonio Ancona, Teresa Sibillano, Francesco De Lucia, Maurizio Dabbicco, Pietro Mario Lugarà, and Gaetano Scamarcio "Laser self-mixing sensor to monitor in situ the penetration depth during short pulse laser drilling of metal targets", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808245 (27 May 2011); https://doi.org/10.1117/12.898101

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