Reduced basis method for real-time inverse scatterometry

Jan Pomplun; Sven Burger; Lin Zschiedrich; Frank Schmidt

doi:10.1117/12.889892

23 May 2011 Reduced basis method for real-time inverse scatterometry

Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 808308 (2011) https://doi.org/10.1117/12.889892
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Optical metrology by scatterometry usually bases on the comparison of experimental and modeled light field data. When solving inverse scatterometric problems, often not only a single simulation has to be carried out, but multiple electromagnetic field solutions have to be computed for varying material and geometrical parameters of the system under consideration. Then, high computational times for a single forward solution can make the complete simulation task infeasible. Table based parameter reconstruction on the other hand has the disadvantage of long offline computational times for creation of the library. Also an increasing number of variable parameters can not be handled efficiently. In this contribution we introduce the reduced basis method for creation of highly accurate reduced order models of parametrized electromagnetic scattering problems. We apply our method to a real-world EUV metrology application and show speed up factors of about 3000 in reconstruction time. Instead of several minutes or hours EUV mask parameters can now be obtained in seconds, i.e., in real-time. Comparison to direct microscopical measurements of the reconstructed geometry demonstrate the good performance and maturity of our method.

Citation Download Citation

Jan Pomplun, Sven Burger, Lin Zschiedrich, and Frank Schmidt "Reduced basis method for real-time inverse scatterometry", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 808308 (23 May 2011); https://doi.org/10.1117/12.889892

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available