Surface profile measurement using a modified stereo microscope

Jian Gao; Xuefeng Qiang; Di Wu; Peisen Huang

doi:10.1117/12.895345

14 September 2011 Surface profile measurement using a modified stereo microscope

Jian Gao, Xuefeng Qiang, Di Wu, Peisen Huang

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330E (2011) https://doi.org/10.1117/12.895345
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

In this research, we propose to modify a traditional stereo microscope for quantitative 3-D surface profile measurement based on the combined stereovision and phase shifting method. A simple optical system and a miniature projector are used to project phase-shifted fringe patterns to the object surface. Two identical black-and-white cameras are used to capture the fringe images of the object surface, one for each optical channel of the stereo microscope. The calculated phase maps are used for stereo matching at the sub-pixel level. The 3-D surface profile is reconstructed using the triangulation method. Experimental results are presented to demonstrate the feasibility of the proposed method.

Citation Download Citation

Jian Gao, Xuefeng Qiang, Di Wu, and Peisen Huang "Surface profile measurement using a modified stereo microscope", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330E (14 September 2011); https://doi.org/10.1117/12.895345

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KEYWORDS

Microscopes

Projection systems

Calibration

Cameras

Fringe analysis

Phase shifting

3D metrology

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