Modeling, error analysis, and compensation in phase-shifting surface profilers

Qingying Jim Hu

doi:10.1117/12.894594

14 September 2011 Modeling, error analysis, and compensation in phase-shifting surface profilers

Qingying Jim Hu

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330L (2011) https://doi.org/10.1117/12.894594
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Optical metrology techniques have been widely used in geometric dimension and shape measurements due to many features such as non-contact measurement, fast measurement speed, digital data format for computerized analysis and visualization, superior resolution, and high accuracy, etc. Among these techniques, phase-shifting based surface profilers have drawn more and more attention due to its full-field measurement and maturing wrapping/unwrapping analysis characteristics. This paper analyzes the error sources in phase-shifting surface profilers, including phaseshifting generation, non-linearity compensation, phase-shifting algorithms, surface contour extraction, modeling, and calibration, etc. Some methods to improve the measurement accuracy through coordinate error compensation are also proposed including transfer functions and look-up table (LUT) methods.

Citation Download Citation

Qingying Jim Hu "Modeling, error analysis, and compensation in phase-shifting surface profilers", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330L (14 September 2011); https://doi.org/10.1117/12.894594

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