Large Diffraction Grating Ruling Engine With Nanometer Digital Control System

Erwin G. Loewen; Robert S. Wiley; Geoffrey Portas

doi:10.1117/12.941737

9 February 1987 Large Diffraction Grating Ruling Engine With Nanometer Digital Control System

Erwin G. Loewen, Robert S. Wiley, Geoffrey Portas

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941737
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Modifications to the MIT-B grating ruling engine have recently been installed. In addition to a new ultra-quiet mechanical drive system for the diamond carriage an entirely new digital servo control system has been installed. It operates with a bit size of 0.09 nm, with virtually infinite control levels. Rowland ghost levels are no longer detectable, which implies that periodic error amplitudes are below 0.5 nm.

Citation Download Citation

Erwin G. Loewen, Robert S. Wiley, and Geoffrey Portas "Large Diffraction Grating Ruling Engine With Nanometer Digital Control System", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941737

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