Paper
16 September 2011 Planar integrated plasmonic mid-IR spectrometer
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Abstract
Mid-IR spectrometers with adequate resolution for chemical sensing and identification are typically large, heavy, and require sophisticated non-stationary optical components. Such spectrometers are limited to laboratory settings. We propose an alternative based on semiconductor micro-fabrication techniques. The device consists of several enabling parts: a compact broad-band IR source, photonic waveguides, a photon-to-surface-plasmon transformer, a surfaceplasmon sample-interaction region, and an array of silicon ring-resonators and detectors to analyze the spectrum. Design considerations and lessons learned from initial experiments are presented.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Figuierdo, J. Nath, G. Medhi, A. Muraviev, C. J. Fredricksen, W. R. Buchwald, J. W. Cleary, and R. E. Peale "Planar integrated plasmonic mid-IR spectrometer", Proc. SPIE 8155, Infrared Sensors, Devices, and Applications; and Single Photon Imaging II, 815503 (16 September 2011); https://doi.org/10.1117/12.892832
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Waveguides

Spectroscopy

Mid-IR

Quantum cascade lasers

Absorption

Silicon

Resonators

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