SCPEM-based polarization modulation ellipsometry in the NIR

F. Bammer; R. Petkovsek

doi:10.1117/12.896914

30 September 2011 SCPEM-based polarization modulation ellipsometry in the NIR

F. Bammer, R. Petkovsek

Proceedings Volume 8169, Optical Fabrication, Testing, and Metrology IV; 81690O (2011) https://doi.org/10.1117/12.896914
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

For high speed quality control in production we had developed a novel approach for fast ellipsometric measurements. Instead of a conventional setup that uses a standard photo-elastic modulator, we use a Single Crystal Photo-Elastic Modulator (SCPEM), for which in this case a LiTaO₃-crystal is used. Instead of an analog Lock-In Amplifier, an automated digital processing based on a fast analog to digital converter is used. This small, simple, and cost-effective solution with its extremely compact and efficient polarization modulation allows fast ellipsometric testing where the upper limit of measurement rates is only limited by the desired accuracy and repeatability of the measurements. Now we present an extension of this measurement from 635nm in the VIS to 1064nm in the NIR and discuss the related problems with signal measurement and retardation control. Further the system speed was enhanced by onboard processing, such that now a sampling rate of 46 kHz is possible.

Citation Download Citation

F. Bammer and R. Petkovsek "SCPEM-based polarization modulation ellipsometry in the NIR", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690O (30 September 2011); https://doi.org/10.1117/12.896914

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