Design of a MOEMS-based electromagnetic driven high efficacious phase grating with angle sensor

Biao Luo; Zhi Yu Wen; Li Chen

doi:10.1117/12.900955

8 September 2011 Design of a MOEMS-based electromagnetic driven high efficacious phase grating with angle sensor

Biao Luo, Zhi Yu Wen, Li Chen

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 819122 (2011) https://doi.org/10.1117/12.900955
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

A novel design for fabricating the high efficacious rectangular phase grating with angle sensor by MOEMS fabrication process is presented in this paper. The purpose of this design is for increasing the Signal-to-Noise of output signal and reducing the size of near infrared spectrometer by using MOEMS grating. Diffraction efficiency is designed and optimizing at first. We used Fourier optical theory and diffraction optical theory analyzed the diffraction efficiency of the rectangular phase grating, and used the PCgrate simulated the design. After analysis and calculation, we found the best parameter of this grating. According the former design of infrared spectrometer by ZEMAX, the angle resolution of angle sensor is 60mV/°, maximal angle is ±4.7° and the size of grating is 5x6mm². Because of the large deflection angle, the electromagnetic force is used for driving this grating. For sensing the grating deflexion angle, we design the angle sensor in the torsion bar of this grating. This sensor is P-type piezoresistive sensor and fabricated on n-(100) high-resistance silicon wafer by boron ion implantation. Analyses stress of torsion bar and piezoresistive angle sensor with Wheatstone bridge theory, the scanning angle θ in a linear relation with output voltages (V_out) of Wheatstone bridge. The size of torsion bar is 2100μmx220μmx75μm, the frequency of first step model is 550Hz. The size of the sensor is 100μmx15μmx0.5μm. Finally, the compatible fabrication process of this device is given. The results of experiments and theory analyzing demonstrate that MOEMS phase grating could work effectively, and angle sensor achieve the real time need. This MOEMS grating is suitable for infrared spectrometer.

Citation Download Citation

Biao Luo, Zhi Yu Wen, and Li Chen "Design of a MOEMS-based electromagnetic driven high efficacious phase grating with angle sensor", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819122 (8 September 2011); https://doi.org/10.1117/12.900955

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microopto electromechanical systems

Diffraction gratings

Sensors

Diffraction

Optical design

Electromagnetism

Silicon

Show All Keywords

Keywords/Phrases

Search In:

Publication Years