Design and analysis of a micromachined gyroscope

Nilgoon Zarei; Albert Leung; John D. Jones

doi:10.1117/12.909171

14 February 2012 Design and analysis of a micromachined gyroscope

Nilgoon Zarei, Albert Leung, John D. Jones

Proceedings Volume 8251, Microfluidics, BioMEMS, and Medical Microsystems X; 82510X (2012) https://doi.org/10.1117/12.909171
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This paper describes the simulation and design of a MEMS thermal gyroscope and optimizing the design for increased sensitivity through the use of the Comsol Multiphysics software package. Two different designs are described, and the effects of working fluid properties are explored. A prototype of this device has been fabricated using techniques for rapid prototyping of MEMS transducers.

Citation Download Citation

Nilgoon Zarei, Albert Leung, and John D. Jones "Design and analysis of a micromachined gyroscope", Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510X (14 February 2012); https://doi.org/10.1117/12.909171

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