Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers

A. Redondo-Cubero; M. Brandt; F. Henneberger; E. Alves; K. Lorenz

doi:10.1117/12.908496

1 March 2012 Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers

A. Redondo-Cubero, M. Brandt, F. Henneberger, E. Alves, K. Lorenz

Proceedings Volume 8263, Oxide-based Materials and Devices III; 82630U (2012) https://doi.org/10.1117/12.908496
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

In this paper we show the application of Rutherford backscattering spectrometry and ion channeling (RBS/C) for the detection of compositional and strain gradients in CdZnO grown almost pseudomorphically on MgZnO. The asymmetric features revealed in X-ray diffraction studies were explained by the compositional gradient found in the first 100 nm close to the interface. Calculations of the effect of such a gradient on the strain state of the layer were developed and contrasted with RBS/C angular scans. Additionally, the substitutional behavior of Cd (and Mg) in Zn-sites was demonstrated.

Citation Download Citation

A. Redondo-Cubero, M. Brandt, F. Henneberger, E. Alves, and K. Lorenz "Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers", Proc. SPIE 8263, Oxide-based Materials and Devices III, 82630U (1 March 2012); https://doi.org/10.1117/12.908496

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available