A controlled-force laser interference profilometer

Bo Yang; Suping Chang; Tiebang Xie; Wen Pan

doi:10.1117/12.905003

15 November 2011 A controlled-force laser interference profilometer

Bo Yang, Suping Chang, Tiebang Xie, Wen Pan

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83212E (2011) https://doi.org/10.1117/12.905003
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

This paper presents a controlled-force laser interference surface measuring system, which can achieve high-precision surface profile measurements in a large range. The key technology of the system is the controlled-force laser interference displacement sensor based on Michelson interference principle. The system operates in micro-force by the voice coil motor (VCM) which alters the measuring contact force in real time and reduces the scratches caused by the stylus tip on the surfaces of the tested samples. The position of the stylus can also be changed, which avoids the damage of the system when the stylus scans across high steps or deep grooves. The optical and mechanical principles of the displacement sensor, the realization method of controllable measuring force and photoelectric signal processing are discussed in this paper. Additionally, this paper introduces the two-dimensional stage used for high precision scanner, and presents primitive experimental results.

Citation Download Citation

Bo Yang, Suping Chang, Tiebang Xie, and Wen Pan "A controlled-force laser interference profilometer", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83212E (15 November 2011); https://doi.org/10.1117/12.905003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available