Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source

Matthew D. Seaberg; Daniel E. Adams; Bosheng Zhang; Dennis F. Gardner; Margaret M. Murnane; Henry C. Kapteyn

doi:10.1117/12.916524

3 April 2012 Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source

Matthew D. Seaberg, Daniel E. Adams, Bosheng Zhang, Dennis F. Gardner, Margaret M. Murnane, Henry C. Kapteyn

Proceedings Volume 8324, Metrology, Inspection, and Process Control for Microlithography XXVI; 83240D (2012) https://doi.org/10.1117/12.916524
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving ≈100 nm resolution. A clear path towards even higher spatial resolution reflection-mode tabletop imaging using apertured-illumination schemes will be discussed.

Citation Download Citation

Matthew D. Seaberg, Daniel E. Adams, Bosheng Zhang, Dennis F. Gardner, Margaret M. Murnane, and Henry C. Kapteyn "Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source", Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 83240D (3 April 2012); https://doi.org/10.1117/12.916524

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