The research on optimal design using FEM (finite elements method) analysis for ultraprecision six-axis nano-stage

Nam-su Kwak; Jae-Yeol Kim

doi:10.1117/12.923316

12 April 2012 The research on optimal design using FEM (finite elements method) analysis for ultraprecision six-axis nano-stage

Nam-su Kwak, Jae-Yeol Kim

Author Affiliations +

Proceedings Volume 8409, Third International Conference on Smart Materials and Nanotechnology in Engineering; 84092U (2012) https://doi.org/10.1117/12.923316
Event: Third International Conference on Smart Materials and Nanotechnology in Engineering, 2011, Shenzhen, China

Abstract

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, Nano-technology and biotechnology. In particular, the Nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to Nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

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Nam-su Kwak and Jae-Yeol Kim "The research on optimal design using FEM (finite elements method) analysis for ultraprecision six-axis nano-stage", Proc. SPIE 8409, Third International Conference on Smart Materials and Nanotechnology in Engineering, 84092U (12 April 2012); https://doi.org/10.1117/12.923316

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