Design of Nanosecond Pulse Laser Micromachining System Based On PMAC

Mingyan Liu; Xing Fu; Linyan Xu; Qian Lin; Shuang Gu

doi:10.1117/12.973663

15 October 2012 Design of nanosecond pulse laser micromachining system based on PMAC

Mingyan Liu, Xing Fu, Linyan Xu, Qian Lin, Shuang Gu

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84180K (2012) https://doi.org/10.1117/12.973663
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Pulse laser micromachining technology, as a branch of laser processing technology, has been widely used in MEMS device processing, aviation, instruments fabrication, circuit board design etc.. In this paper, a novel nanosecond pulse laser micromachining system is presented, which consists of nanosecond pulse LASER, optical path mechanical structure, transmission system, motion control system. Nanosecond pulse UV laser, with 355 nm wavelength and 40ns pulse width, is chosen as the light source. Optical path mechanical structure is designed to get ideal result of laser focusing. Motion control system, combining PMAC card with the PC software, can control the 3-D motion platform and complete microstructure processing. By CCD monitoring system, researchers can get real-time detection on the effect of laser beam focusing and processing process.

Citation Download Citation

Mingyan Liu, Xing Fu, Linyan Xu, Qian Lin, and Shuang Gu "Design of nanosecond pulse laser micromachining system based on PMAC", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180K (15 October 2012); https://doi.org/10.1117/12.973663

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