Sub-micron resolution high-speed spectral domain optical coherence tomography in quality inspection for printed electronics

J. Czajkowski; J. Lauri; R. Sliz; P. Fält; T. Fabritius; R. Myllylä; B. Cense

doi:10.1117/12.922443

4 May 2012 Sub-micron resolution high-speed spectral domain optical coherence tomography in quality inspection for printed electronics

J. Czajkowski, J. Lauri, R. Sliz, P. Fält, T. Fabritius, R. Myllylä, B. Cense

Author Affiliations +

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84300K (2012) https://doi.org/10.1117/12.922443
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We present the use of sub-micron resolution optical coherence tomography (OCT) in quality inspection for printed electronics. The device used in the study is based on a supercontinuum light source, Michelson interferometer and high-speed spectrometer. The spectrometer in the presented spectral-domain optical coherence tomography setup (SD-OCT) is centered at 600 nm and covers a 400 nm wide spectral region ranging from 400 nm to 800 nm. Spectra were acquired at a continuous rate of 140,000 per second. The full width at half maximum of the point spread function obtained from a Parylene C sample was 0:98 m. In addition to Parylene C layers, the applicability of sub-micron SD-OCT in printed electronics was studied using PET and epoxy covered solar cell, a printed RFID antenna and a screen-printed battery electrode. A commercial SD-OCT system was used for reference measurements.

Citation Download Citation

J. Czajkowski, J. Lauri, R. Sliz, P. Fält, T. Fabritius, R. Myllylä, and B. Cense "Sub-micron resolution high-speed spectral domain optical coherence tomography in quality inspection for printed electronics", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300K (4 May 2012); https://doi.org/10.1117/12.922443

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