Preparation of periodically arranged metallic nanostructures using nanoimprint lithography

S. Jüchter; H. Hauser; Ch. Wellens; A. Guttowski; M. Peters; J. C. Goldschmidt; U. T. Schwarz; B. Bläsi

doi:10.1117/12.922214

2 May 2012 Preparation of periodically arranged metallic nanostructures using nanoimprint lithography

S. Jüchter, H. Hauser, Ch. Wellens, A. Guttowski, M. Peters, J. C. Goldschmidt, U. T. Schwarz, B. Bläsi

Proceedings Volume 8438, Photonics for Solar Energy Systems IV; 84380S (2012) https://doi.org/10.1117/12.922214
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

We present a process chain to generate periodically arranged metallic nanostructures supporting plasmons for the use in solar cells. As proof-of-concept, platinum and silver nanoparticles with a period of 1 μm and a diameter of 600 nm were fabricated. For the platinum particles, an absorption enhancement for light with a wavelength of 3.6 μm was observed in silicon. By decreasing structure sizes the active spectral region can be shifted to wavelength relevant for solar cell applications. Therefore, in a second step a silver grating with a smaller period and also smaller diameter of approximately 200 nm was realized.

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S. Jüchter, H. Hauser, Ch. Wellens, A. Guttowski, M. Peters, J. C. Goldschmidt, U. T. Schwarz, and B. Bläsi "Preparation of periodically arranged metallic nanostructures using nanoimprint lithography", Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84380S (2 May 2012); https://doi.org/10.1117/12.922214

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