Enabling large focal plane arrays through mosaic hybridization

Timothy M. Miller; Christine A. Jhabvala; Edward Leong; Nicholas P. Costen; Elmer Sharp; Tomoko Adachi; Dominic J. Benford

doi:10.1117/12.926491

25 September 2012 Enabling large focal plane arrays through mosaic hybridization

Timothy M. Miller, Christine A. Jhabvala, Edward Leong, Nicholas P. Costen, Elmer Sharp, Tomoko Adachi, Dominic J. Benford

Author Affiliations +

Proceedings Volume 8453, High Energy, Optical, and Infrared Detectors for Astronomy V; 84532H (2012) https://doi.org/10.1117/12.926491
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

We have demonstrated advances in mosaic hybridization that will enable very large format far-infrared detectors. Specifically we have produced electrical detector models via mosaic hybridization yielding superconducting circuit paths by hybridizing separately fabricated sub-units onto a single detector unit. The detector model was made on a 100mm diameter wafer while four model readout quadrant chips were made from a separate 100mm wafer. The individually fabricated parts were hybridized using a flip-chip bonder to assemble the detector-readout stack. Once all of the hybridized readouts were in place, a single, large and thick silicon substrate was placed on the stack and attached with permanent epoxy to provide strength and a Coefficient of Thermal Expansion match to the silicon components underneath. Wirebond pads on the readout chips connect circuits to warm readout electronics; and were used to validate the successful superconducting electrical interconnection of the model mosaic-hybrid detector. This demonstration is directly scalable to 150 mm diameter wafers, enabling pixel areas over ten times the area currently available.

Citation Download Citation

Timothy M. Miller, Christine A. Jhabvala, Edward Leong, Nicholas P. Costen, Elmer Sharp, Tomoko Adachi, and Dominic J. Benford "Enabling large focal plane arrays through mosaic hybridization", Proc. SPIE 8453, High Energy, Optical, and Infrared Detectors for Astronomy V, 84532H (25 September 2012); https://doi.org/10.1117/12.926491

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available