High-rate, roll-to-roll nanomanufacturing of flexible systems

Khershed P. Cooper; Ralph F. Wachter

doi:10.1117/12.940775

11 October 2012 High-rate, roll-to-roll nanomanufacturing of flexible systems

Khershed P. Cooper, Ralph F. Wachter

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 846602 (2012) https://doi.org/10.1117/12.940775
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

Since the National Nanotechnology Initiative was first announced in 2000, nanotechnology has developed an impressive catalog of nano-scale structures with building-blocks such as nanoparticles, nanotubes, nanorods, nanopillars, and quantum dots. Similarly, there are accompanying materials processes such as, atomic layer deposition, pulsed layer deposition, nanoprinting, nanoimprinting, transfer printing, nanolithography and nanopatterning. One of the challenges of nanomanufacturing is scaling up these processes reliably and affordably. Roll-to-roll manufacturing is a means for scaling up, for increasing throughput. It is high-speed production using a continuous, moving platform such as a web or a flexible substrate. The adoption of roll-to-roll to nanomanufacturing is novel. The goal is to build structures and devices with nano-scale features and specific functionality. The substrate could be a polymer, metal foil, silk, cloth or paper. The materials to build the structures and multi-level devices could be organic, inorganic or biological. Processing could be solution-based, e.g., ink-jet printing, or vacuum-based, e.g., chemical vapor deposition. Products could be electronics, optoelectronics, membranes, catalysts, microfluidics, lab-on-film, filters, etc. By this means, processing of large and conformal areas is achievable. High-throughput translates into low cost, which is the attraction of roll-to-roll nanomanufacturing. There are technical challenges requiring fundamental scientific advances in materials and process development and in manufacturing and system-integration where achieving nano-scale feature size, resolution and accuracy at high speeds can be major hurdles. We will give an overview of roll-to-roll nanomanufacturing with emphasis on the need to understand the material, process and system complexities, the need for instrumentation, measurement, and process control and describe the concept of cyber-enabled nanomanufacturing for reliable and predictable production.

Citation Download Citation

Khershed P. Cooper and Ralph F. Wachter "High-rate, roll-to-roll nanomanufacturing of flexible systems", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 846602 (11 October 2012); https://doi.org/10.1117/12.940775

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