Surface characterization using combined analysis of original and scatter image

Wenjing Zhao; Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.929472

15 October 2012 Surface characterization using combined analysis of original and scatter image

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 8495, Reflection, Scattering, and Diffraction from Surfaces III; 849508 (2012) https://doi.org/10.1117/12.929472
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

In a corresponding paper the optical design of combined microscopic and scatterometrical imaging devices is extensively discussed. The current paper deals with concepts of the necessary combined data analysis. A major problem is the fact that usually only the power distributions of both original and scatter images can be measured with arguable effort, and so both domains have to offer certain non-redundant information. Basic concepts, theoretical investigations of limitations and examples from typical applications are presented.

Citation Download Citation

Wenjing Zhao, Cornelius Hahlweg, and Hendrik Rothe "Surface characterization using combined analysis of original and scatter image", Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 849508 (15 October 2012); https://doi.org/10.1117/12.929472

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