Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator

Y. Senba; H. Kishimoto; T. Miura; H. Ohashi; S. Goto; T. Ishikawa

doi:10.1117/12.936518

15 October 2012 Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator

Y. Senba, H. Kishimoto, T. Miura, H. Ohashi, S. Goto, T. Ishikawa

Author Affiliations +

Proceedings Volume 8501, Advances in Metrology for X-Ray and EUV Optics IV; 850104 (2012) https://doi.org/10.1117/12.936518
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

A varied-line-space grating is used in modern soft X-ray monochromators with a high resolving power. The grating parameters require high accuracy because errors of the parameters lead to the degradation of the resolving power. The parameter tolerances required to maintain a high resolving power were estimated by analytical calculation. The groove density variations of three gratings were measured with a long trace profiler. The measured errors in the parameters were found to be sufficiently small.

Citation Download Citation

Y. Senba, H. Kishimoto, T. Miura, H. Ohashi, S. Goto, and T. Ishikawa "Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator", Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850104 (15 October 2012); https://doi.org/10.1117/12.936518

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