Inductively coupled plasma etching for delineation of InAs/GaSb pixels

Jean Nguyen; John Gill; Sir B. Rafol; Alexander Soibel; Arezou Khoshakhlagh; David Ting; Sam Keo; Anita Fisher; Edward Luong; John Liu; Jason Mumolo; Sarath D. Gunapala

doi:10.1117/12.930046

24 October 2012 Inductively coupled plasma etching for delineation of InAs/GaSb pixels

Jean Nguyen, John Gill, Sir B. Rafol, Alexander Soibel, Arezou Khoshakhlagh, David Ting, Sam Keo, Anita Fisher, Edward Luong, John Liu, Jason Mumolo, Sarath D. Gunapala

Author Affiliations +

Proceedings Volume 8511, Infrared Remote Sensing and Instrumentation XX; 851103 (2012) https://doi.org/10.1117/12.930046
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We developed 320x256 Complimentary Barrier Infrared (CBIRD) focal plane array (FPA) for long wave infrared (LWIR) imaging application. The FPA layers grown by molecular beam epitaxy (MBE) had 300 periods 1.9 μm thick absorber. The CBIRD arrays showed the mean dark current density of 2.2 x 10-4 A/cm2, when 128 mV bias voltage was applied. The long wave cut off was observed at 8.8 μm at the 50 % peak and the maximum quantum efficiency was 54 % at 5.6 μm. The arrays had 81 % fill factor with 97 % operability with noise equivalent difference temperature (NEΔT) of 18.6 mK and a mean detectivity of D*=1.3 x 1011 Hz1/2/W.

Citation Download Citation

Jean Nguyen, John Gill, Sir B. Rafol, Alexander Soibel, Arezou Khoshakhlagh, David Ting, Sam Keo, Anita Fisher, Edward Luong, John Liu, Jason Mumolo, and Sarath D. Gunapala "Inductively coupled plasma etching for delineation of InAs/GaSb pixels", Proc. SPIE 8511, Infrared Remote Sensing and Instrumentation XX, 851103 (24 October 2012); https://doi.org/10.1117/12.930046

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