Laser induced damage threshold and optical properties of TiO[sub]2[/sub] and Al[sub]2[/sub]O[sub]3[/sub] coatings prepared by atomic layer deposition

Lars O. Jensen; Heinrich Mädebach; Jarmo Maula; Karlheinz Gürtler; Detlev Ristau

doi:10.1117/12.976859

4 December 2012 Laser induced damage threshold and optical properties of TiO₂ and Al₂O₃ coatings prepared by atomic layer deposition

Lars O. Jensen, Heinrich Mädebach, Jarmo Maula, Karlheinz Gürtler, Detlev Ristau

Author Affiliations +

Proceedings Volume 8530, Laser-Induced Damage in Optical Materials: 2012; 853010 (2012) https://doi.org/10.1117/12.976859
Event: SPIE Laser Damage, 2012, Boulder, Colorado, United States

Abstract

Atomic Layer Deposition (ALD) allows for the deposition of homogeneous and conformal coatings with superior microstructural properties and well controllable thickness. As a consequence, ALD-processes have moved into the focus of optical thin film research during the last decade. In contrast to this, only a relatively small number of investigations in the power handling capability of ALD-coatings have been reported until now. The present contribution summarizes results of a study dedicated to the optical properties of single layers and high reflecting coating systems of TiO₂ and Al₂O₃ deposited by ALD. Besides Laser Induced Damage Threshold (LIDT) values, the spectral characteristics as well the absorption and scatter losses are discussed.

Citation Download Citation

Lars O. Jensen, Heinrich Mädebach, Jarmo Maula, Karlheinz Gürtler, and Detlev Ristau "Laser induced damage threshold and optical properties of TiO₂ and Al₂O₃ coatings prepared by atomic layer deposition", Proc. SPIE 8530, Laser-Induced Damage in Optical Materials: 2012, 853010 (4 December 2012); https://doi.org/10.1117/12.976859

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available