Effects of dispense equipment sequence on process start-up defects

Nick Brakensiek; Michael Sevegney

doi:10.1117/12.2011671

29 March 2013 Effects of dispense equipment sequence on process start-up defects

Nick Brakensiek, Michael Sevegney

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 86822A (2013) https://doi.org/10.1117/12.2011671
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Photofluid dispense systems within coater/developer tools have been designed with the intent to minimize cost of ownership to the end user. Waste and defect minimization, dispense quality and repeatability, and ease of use are all desired characteristics. One notable change within commercially available systems is the sequence in which process fluid encounters dispense pump and filtration elements. Traditionally, systems adopted a pump-first sequence, where fluid is “pushed through” a point-of-use filter just prior to dispensing on the wafer. Recently, systems configured in a pump-last scheme have become available, where fluid is “pulled through” the filter, into the pump, and then is subsequently dispensed. The present work constitutes a comparative evaluation of the two equipment sequences with regard to the aforementioned characteristics that impact cost of ownership. Additionally, removal rating and surface chemistry (i.e., hydrophilicity) of the point-of-use filter are varied in order to evaluate their influence on system start-up and defects.

Citation Download Citation

Nick Brakensiek and Michael Sevegney "Effects of dispense equipment sequence on process start-up defects", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86822A (29 March 2013); https://doi.org/10.1117/12.2011671

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available