Paper
11 April 2013 Fabrication and thermal characteristics of Ti-Ag-Ni coated regenerated grating sensors for high-temperature sensing
Yun Tu, Yi-Hua Qi, Tung Shan Tu
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Abstract
A regenerated grating (RG) sensor with titanium (Ti) - silver (Ag) - nickel (Ni) multilayer coatings is fabricated by magnetron sputtering and electroplating processes. Optical and thermal testing are performed to evaluate the characteristics of the Ti-Ag-Ni coated RG sensor. The profiles of the reflection spectra of the RG are slightly affected by the metallization process. The shift in the Bragg wavelength of the Ti-Ag-Ni coated RG sensor can be described as a piecewise linear function of temperature, with slope discontinuity at 250 °C. The Ti-Ag-Ni coated RG sensor exhibits more than twice higher sensitivity than that of the bare RG, with satisfactory repeatability and stability at temperatures of up to 600 °C. The surface and cross-section of the sensor are observed with scanning electron microscopy (SEM). The SEM images clear show no discontinuity at the interface between the optical fiber and titanium layer, as well as a good quality of nickel coating without visible dendritic growth. These results indicate that the Ti-Ag-Ni coated RG sensors can be successfully fabricated by combining magnetron sputtering with electroplating, and provide the great potential for high-temperature sensing because of their good sensitivity, repeatability and stability.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yun Tu, Yi-Hua Qi, and Tung Shan Tu "Fabrication and thermal characteristics of Ti-Ag-Ni coated regenerated grating sensors for high-temperature sensing", Proc. SPIE 8693, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2013, 869309 (11 April 2013); https://doi.org/10.1117/12.2012117
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Cited by 2 scholarly publications.
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KEYWORDS
Roentgenium

Sensors

Electroplating

Optical coatings

Optical fibers

Sputter deposition

Nickel

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