MEMS clocking-cantilever thermal detector

Evan Smith; Javaneh Boroumand; Imen Rezadad; Pedro Figueiredo; Janardan Nath; Deep Panjwani; R. E. Peale; Oliver Edwards

doi:10.1117/12.2018102

18 June 2013 MEMS clocking-cantilever thermal detector

Evan Smith, Javaneh Boroumand, Imen Rezadad, Pedro Figueiredo, Janardan Nath, Deep Panjwani, R. E. Peale, Oliver Edwards

Author Affiliations +

Proceedings Volume 8704, Infrared Technology and Applications XXXIX; 87043B (2013) https://doi.org/10.1117/12.2018102
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

We present performance calculations for a MEMS cantilever device for sensing heat input from convection or radiation. The cantilever deflects upwards under an electrostatic repulsive force from an applied periodic saw-tooth bias voltage, and returns to a null position as the bias decreases. Heat absorbed during the cycle causes the cantilever to deflect downwards, thus decreasing the time to return to the null position. In these calculations, the total deflection with respect to absorbed heat is determined and is described as a function of time. We present estimates of responsivity and noise.

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Evan Smith, Javaneh Boroumand, Imen Rezadad, Pedro Figueiredo, Janardan Nath, Deep Panjwani, R. E. Peale, and Oliver Edwards "MEMS clocking-cantilever thermal detector ", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87043B (18 June 2013); https://doi.org/10.1117/12.2018102

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