Optical stimulated thermoluminescence in silicon rich oxide nanostructured films

D. Berman-Mendoza; M. Aceves-Mijares; T. Piters; R. García-Gutiérrez; C. F. Ruiz-Valdez; A. Ramos-Carrasco; L. R. Berriel-Valdos

doi:10.1117/12.2026484

18 November 2013 Optical stimulated thermoluminescence in silicon rich oxide nanostructured films

D. Berman-Mendoza, M. Aceves-Mijares, T. Piters, R. García-Gutiérrez, C. F. Ruiz-Valdez, A. Ramos-Carrasco, L. R. Berriel-Valdos

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Proceedings Volume 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications; 87858I (2013) https://doi.org/10.1117/12.2026484
Event: 8th Ibero American Optics Meeting/11th Latin American Meeting on Optics, Lasers, and Applications, 2013, Porto, Portugal

Abstract

In this work, it is study thermoluminescent phenomena (TL) optically stimulated with UV radiation in Silicon Rich Oxide (SRO) nanostructured thin films. The experimental samples used were thin films of this composite deposited by Low Pressure Chemical Vapor Deposition (LPCVD) over a n-type silicon substrate, this samples were fabricated using different flow ratios of precursory gases silane and nitrous oxide R₀=SiH₄/N₂O during the deposition and were given posterior thermal treatment which gave place to the formation of different sized nanoparticles, that are attributed to the luminescent activation mechanism in this material. The silicon excess was controlled by the ratio of the gases used in the deposition process and in this way SRO films with 12, 8 and 6% silicon excess were obtained. The glow-curves experimentally obtained were submitted to analysis using different models in order to obtain important thermoluminescent parameters. The luminescence spectra of SRO show two wavelength regions of emission; one in the blue part and one in the red part of the emission spectrum. The emission in the blue part is related to defects in the SiO lattice. About the origin of the red luminescence there is still a controversy. One model assumes that the red luminescence stems from Si nano particles and another model assumes that defects at the interface of SiO bulk with the Si nano particle are responsible for the red luminescence. Finally is intended to provide favorable conditions for the development of a UV dosimeter with this material.

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D. Berman-Mendoza, M. Aceves-Mijares, T. Piters, R. García-Gutiérrez, C. F. Ruiz-Valdez, A. Ramos-Carrasco, and L. R. Berriel-Valdos "Optical stimulated thermoluminescence in silicon rich oxide nanostructured films", Proc. SPIE 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications, 87858I (18 November 2013); https://doi.org/10.1117/12.2026484

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KEYWORDS

Silicon

Luminescence

Ultraviolet radiation

Silicon films

Oxides

Low pressure chemical vapor deposition

Thermography

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