ASE suppression of XeCl excimer laser MOPA system using UV electro-optical switch

Yun Hu; Xue-qing Zhao; Quan-xi Xue; Da-hui Wang; Guo-xin Zheng; Heng-qi Hua; Yongsheng Zhang; Yong-xiang Zhu; Wei-wei Xiao; Li Wang

doi:10.1117/12.2011272

16 May 2013 ASE suppression of XeCl excimer laser MOPA system using UV electro-optical switch

Yun Hu, Xue-qing Zhao, Quan-xi Xue, Da-hui Wang, Guo-xin Zheng, Heng-qi Hua, Yongsheng Zhang, Yong-xiang Zhu, Wei-wei Xiao, Li Wang

Author Affiliations +

Proceedings Volume 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012); 879624 (2013) https://doi.org/10.1117/12.2011272
Event: 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 2012, Xi'an, Shaanxi, China

Abstract

In high power eximer laser system, amplified spontaneous emission (ASE) decreases the signal contrast ratio severely, leads to waveform broadening and distortion, and impacts on accurate physical experiments. In this article, based on principle of short pulse generation by electro-optical (E-O) switch, a method for ASE suppression of laser amplifiers chain was established. A series of studies on UV electro-optical switches were carried out, and electro-optical (E-O) switches with high extinction ratio were developed. In the waveform clipping experiments of the first pre-amplifier, the extinction ratio of the single and cascaded dual E-O switch reaches 10³ and 10⁴ order of magnitude, the laser pulse signal contrast ratio was promoted to 10⁵ and 10⁶ level, respectively. In the experiments of single channel MOPA (Master Oscillator Power Amplifier system), the cascaded dual E-O switch was adopted to suppress ASE of the whole system, and a fine narrow pulse was obtained on the target surface, which gives out one effective solution to the problem of waveform amplification of the high power eximer laser system.

Citation Download Citation

Yun Hu, Xue-qing Zhao, Quan-xi Xue, Da-hui Wang, Guo-xin Zheng, Heng-qi Hua, Yongsheng Zhang, Yong-xiang Zhu, Wei-wei Xiao, and Li Wang "ASE suppression of XeCl excimer laser MOPA system using UV electro-optical switch", Proc. SPIE 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 879624 (16 May 2013); https://doi.org/10.1117/12.2011272

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