Research of extended-wavelength 64x64 In0.83Ga0.17As focal plane arrays

Ming Shi; Tao Li; Xiumei Shao; Xue Li; Haimei Gong

doi:10.1117/12.2034923

11 September 2013 Research of extended-wavelength 64x64 In_0.83Ga_0.17As focal plane arrays

Ming Shi, Tao Li, Xiumei Shao, Xue Li, Haimei Gong

Proceedings Volume 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications; 890755 (2013) https://doi.org/10.1117/12.2034923
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

Planar 64x64 In_0.83Ga_0.17As focal plane arrays (FPA) were fabricated in this paper. The properties of In_0.83Ga_0.17As photodetectors such as I-V, responsivity, detectivity were characterized. Theoretical analysis and measurement of the dark current behavior of the detectors at 200-300K were presented. The typical bad pixels caused by excessive dark current were analyzed, the result shows that they are mainly caused by more ohmic current and trap-assisted tunneling current component. Dark current density is 0.986μA/cm² at an operating temperature of 200K and a bias voltage of -10 mV. The relative spectral response is in the range of 1.38 μm to 2.6 μm at 280K. The peak spectral response wavelength and quantum efficiency are 2.2 μm and 71.2% at 280K respectively. The achieved peak detectivity can reach 4.05x10¹¹cmHz^1/2W^-1 by thermoelectric cooling at 200K.

Citation Download Citation

Ming Shi, Tao Li, Xiumei Shao, Xue Li, and Haimei Gong "Research of extended-wavelength 64x64 In_0.83Ga_0.17As focal plane arrays", Proc. SPIE 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications, 890755 (11 September 2013); https://doi.org/10.1117/12.2034923

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