Paper
10 October 2013 FPGA-based signal processing method of automatic interference comparator
Zhongyu Wang, Haitao Chang, Hongtang Gao, Xiaoyou Ye
Author Affiliations +
Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89161X (2013) https://doi.org/10.1117/12.2035599
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
Automatic interference comparator (AIC) is a high precision one-dimensional length measurement machine for investigation and calibrations of line scales, linear encoders and length gauges. This paper emphasizes a novel electronic subdivision method for the AIC to realize precision measurement, which is composed of integer fringe counting, fraction fringe counting and electronic strobe. The realization of the whole system is based on FPGA. A standard line scale has been calibrated by this method on the AIC of the National Institute of Metrology(NIM) in China. The experimental results show the measurement repeatability is less than 7.5 nm, which demonstrates the feasibility of the new signal processing method.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhongyu Wang, Haitao Chang, Hongtang Gao, and Xiaoyou Ye "FPGA-based signal processing method of automatic interference comparator", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161X (10 October 2013); https://doi.org/10.1117/12.2035599
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KEYWORDS
Signal processing

Calibration

Field programmable gate arrays

Precision measurement

Metrology

Mirrors

Beam splitters

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