Flash extreme ultraviolet holographic microscopy in a table top setup

Nils C. Monserud; Erik B. Malm; Przemyslaw W. Wachulak; Huiwen Xu; Ganesh Balakrishnan; Weilun Chao; Erik Anderson; Mario C. Marconi

doi:10.1117/12.2041698

12 March 2014 Flash extreme ultraviolet holographic microscopy in a table top setup

Nils C. Monserud, Erik B. Malm, Przemyslaw W. Wachulak, Huiwen Xu, Ganesh Balakrishnan, Weilun Chao, Erik Anderson, Mario C. Marconi

Author Affiliations +

Proceedings Volume 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI; 89490K (2014) https://doi.org/10.1117/12.2041698
Event: SPIE BiOS, 2014, San Francisco, California, United States

Abstract

We present a single-shot Fourier transform holography setup with ~100nm spatial resolution and 1 ns temporal resolution using a tabletop extreme ultraviolet (EUV) laser. Flash images allowed for the imaging of nano-pillars oscillating at MHz frequencies that will enable the evaluation of mechanical properties of nanoscale mechanical oscillators.

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Nils C. Monserud, Erik B. Malm, Przemyslaw W. Wachulak, Huiwen Xu, Ganesh Balakrishnan, Weilun Chao, Erik Anderson, and Mario C. Marconi "Flash extreme ultraviolet holographic microscopy in a table top setup", Proc. SPIE 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, 89490K (12 March 2014); https://doi.org/10.1117/12.2041698

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