Step-height measurement with a low coherence interferometer using continuous wavelet transform

Zhang Jian; Takamasa Suzuki; Samuel Choi; Osami Sasaki

doi:10.1117/12.2042640

19 December 2013 Step-height measurement with a low coherence interferometer using continuous wavelet transform

Zhang Jian, Takamasa Suzuki, Samuel Choi, Osami Sasaki

Proceedings Volume 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 90461I (2013) https://doi.org/10.1117/12.2042640
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

With the development of electronic technology in recent years, electronic components become increasingly miniaturized. At the same time a more accurate measurement method becomes indispensable. In the current measurement of nano-level, the Michelson interferometer with the laser diode is widely used, the method can measure the object accurately without touching the object. However it can't measure the step height that is larger than the half-wavelength. In this study, we improve the conventional Michelson interferometer by using a super luminescent diode and continuous wavelet transform, which can detect the time that maximizes the amplitude of the interference signal. We can accurately measure the surface-position of the object with this time. The method used in this experiment measured the step height of 20 microns.

Citation Download Citation

Zhang Jian, Takamasa Suzuki, Samuel Choi, and Osami Sasaki "Step-height measurement with a low coherence interferometer using continuous wavelet transform", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90461I (19 December 2013); https://doi.org/10.1117/12.2042640

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KEYWORDS

Ferroelectric materials

Continuous wavelet transforms

Interferometers

Mirrors

Diodes

Beam splitters

Charge-coupled devices

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