The fabrication of the holographic dual-blazed grating

Quan Liu; Jianhong Wu; Minghui Chen; Yu Cheng

doi:10.1117/12.2036785

21 December 2013 The fabrication of the holographic dual-blazed grating

Quan Liu, Jianhong Wu, Minghui Chen, Yu Cheng

Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470F (2013) https://doi.org/10.1117/12.2036785
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

A holographic dual-blazed grating with the period of 833 nm at ultraviolet-visible-near infrared was designed. To achieve higher and uniform diffraction efficiency, the grating profile was optimized by using rigorous coupled-wave analysis. The results show: when the two blaze angles of the dual-blazed grating, one within the range from 10 degree to 12 degree and the other one within the range from 26 degree to 32 degree respectively, the first-order diffraction efficiency is more than 30 percent within the wavelength from 0.25μm to 1μm. The holographic dual-blazed grating, one half with the blaze angle of 11 degree and the anti-blaze angle of 72 degree; and the other half with the blaze angle of 29 degree and the anti-blaze angle of 56 degree respectively, have been fabricated by improved holographic ion beam etching.

Citation Download Citation

Quan Liu, Jianhong Wu, Minghui Chen, and Yu Cheng "The fabrication of the holographic dual-blazed grating", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470F (21 December 2013); https://doi.org/10.1117/12.2036785

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