Self-consistent field theory of directed self-assembly on chemically prepatterned surfaces

Kenichi Izumi; Nabil Laachi; XingKun Man; Kris T. Delaney; Glenn H. Fredrickson

doi:10.1117/12.2045917

28 March 2014 Self-consistent field theory of directed self-assembly on chemically prepatterned surfaces

Kenichi Izumi, Nabil Laachi, XingKun Man, Kris T. Delaney, Glenn H. Fredrickson

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 904922 (2014) https://doi.org/10.1117/12.2045917
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

We use self-consistent field theory to investigate the self-assembly of AB diblock copolymers on chemically patterned substrates. The striped substrates consist of attractive domains alternating with neutral ones. Using our simulations, we observe the formation of different self-assembled morphologies in the polymer film and compute their formation free energy for various pattern widths and wetting conditions. We found that perpendicular lamellae are best formed when the A-attractive stripes have a width near half the natural lamellar period in bulk, but lamellar structures with wide bases are also formed in wide stripes. We also computed the formation energy of isolated dislocations and found that the energy cost is ≈ 50-110kT for ±15nm deviations from optimal commensurability conditions.

Citation Download Citation

Kenichi Izumi, Nabil Laachi, XingKun Man, Kris T. Delaney, and Glenn H. Fredrickson "Self-consistent field theory of directed self-assembly on chemically prepatterned surfaces", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904922 (28 March 2014); https://doi.org/10.1117/12.2045917

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