Super finished surface roughness measurement sensor for hard access area

Zirong Zhai; Guangping Xie; Paolo Trallori; Ming Jia; Kevin G. Harding

doi:10.1117/12.2052708

28 May 2014 Super finished surface roughness measurement sensor for hard access area

Zirong Zhai, Guangping Xie, Paolo Trallori, Ming Jia, Kevin G. Harding

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100S (2014) https://doi.org/10.1117/12.2052708
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

The accurate measurement of surface roughness is essential in ensuring the desired quality of machined parts. Today the most common method to check roughness is to use a contact stylus profiler. There are many challenges for the application of a contact stylus for measuring the surface roughness of machined parts especially for the hard to access areas such as slots, deep holes and curved pockets. This study proposes a surface roughness measurement technique for these hard to access areas that are based on the measurement of the statistical analysis of the specular and scattered light intensity. In order to solve the accessibility issue, a miniaturized roughness measurement sensor with an Ø3mm diameter was designed using a dual laser emitting configuration. This dual laser approach makes the system more durable and reliable for different materials and machining processes such as polishing, lapping and precision grinding. This paper will present initial research results that demonstrate the applications of this approach to real industrial parts. Tests were performed to evaluate the sensitivity and feasibility of the proposed technique with various machined surfaces and materials.

Citation Download Citation

Zirong Zhai, Guangping Xie, Paolo Trallori, Ming Jia, and Kevin G. Harding "Super finished surface roughness measurement sensor for hard access area", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100S (28 May 2014); https://doi.org/10.1117/12.2052708

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KEYWORDS

Surface roughness

Light scattering

Sensors

Polishing

Scattering

Surface finishing

Calibration

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