Superlattice-doped silicon detectors: progress and prospects

Michael E. Hoenk; Shouleh Nikzad; Alexander G. Carver; Todd J. Jones; John Hennessy; April D. Jewell; Joseph Sgro; Shraga Tsur; Mickel McClish; Richard Farrell

doi:10.1117/12.2057678

30 July 2014 Superlattice-doped silicon detectors: progress and prospects

Michael E. Hoenk, Shouleh Nikzad, Alexander G. Carver, Todd J. Jones, John Hennessy, April D. Jewell, Joseph Sgro, Shraga Tsur, Mickel McClish, Richard Farrell

Author Affiliations +

Proceedings Volume 9154, High Energy, Optical, and Infrared Detectors for Astronomy VI; 915413 (2014) https://doi.org/10.1117/12.2057678
Event: SPIE Astronomical Telescopes + Instrumentation, 2014, Montréal, Quebec, Canada

Abstract

In this paper we review the physics and performance of silicon detectors passivated with wafer-scale molecular beam epitaxy (MBE) and atomic layer deposition (ALD). MBE growth of a two-dimensional (2D) doping superlattice on backside-illuminated (BSI) detectors provides nearly perfect protection from interface traps, even at trap densities in excess of 10¹⁴ cm^-2. Superlattice-doped, BSI CMOS imaging detectors show no measurable degradation of quantum efficiency or dark current from long-term exposure to pulsed DUV lasers. Wafer-scale superlattice-doping has been used to passivate CMOS and CCD imaging arrays, fully-depleted CCDs and photodiodes, and large-area avalanche photodiodes. Superlattice-doped CCDs with ALD-grown antireflection coatings achieved world record quantum efficiency at deep and far ultraviolet wavelengths (100-300nm). Recently we have demonstrated solar-blind, superlattice doped avalanche photodiodes using integrated metal-dielectric coatings to achieve selective detection of ultraviolet light in the 200-250 nm spectral range with high out-of-band rejection.

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Michael E. Hoenk, Shouleh Nikzad, Alexander G. Carver, Todd J. Jones, John Hennessy, April D. Jewell, Joseph Sgro, Shraga Tsur, Mickel McClish, and Richard Farrell "Superlattice-doped silicon detectors: progress and prospects", Proc. SPIE 9154, High Energy, Optical, and Infrared Detectors for Astronomy VI, 915413 (30 July 2014); https://doi.org/10.1117/12.2057678

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