Stack of PECVD silicon nitride nano-films on optical fiber end-face for refractive index sensing

Mateusz Śmietana; Marcin Koba; Radoslaw Różycki-Bakon

doi:10.1117/12.2059770

2 June 2014 Stack of PECVD silicon nitride nano-films on optical fiber end-face for refractive index sensing

Mateusz Śmietana, Marcin Koba, Radoslaw Różycki-Bakon

Proceedings Volume 9157, 23rd International Conference on Optical Fibre Sensors; 91575F (2014) https://doi.org/10.1117/12.2059770
Event: OFS2014 23rd International Conference on Optical Fiber Sensors, 2014, Santander, Spain

Abstract

This paper presents a stack of silicon nitride (SiNx) nano-films deposited with radio-frequency plasma-enhanced chemical deposition (RF PECVD) method on single-mode fiber end-face for refractive index (RI) sensing. The stack consist of high (n~2.4) and low (n~1.9) refractive index (at λ=1550 nm) SiN_x nano-films arranged alternately. As a result of the experiment where 5 nano-layers were deposited, we received down to -30 dB-deep resonance in reflection spectrum at about λ=1550 nm. In the proposed sensing scheme both reflected power and wavelength of the resonance can be used for external RI measurements.

Citation Download Citation

Mateusz Śmietana, Marcin Koba, and Radoslaw Różycki-Bakon "Stack of PECVD silicon nitride nano-films on optical fiber end-face for refractive index sensing", Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 91575F (2 June 2014); https://doi.org/10.1117/12.2059770

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