Multilayer soft x-ray optics

Charles M. Falco

doi:10.1117/12.2063904

20 October 2014 Multilayer soft x-ray optics

Charles M. Falco

Proceedings Volume 9186, Fifty Years of Optical Sciences at The University of Arizona; 91860M (2014) https://doi.org/10.1117/12.2063904
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.

Citation Download Citation

Charles M. Falco "Multilayer soft x-ray optics", Proc. SPIE 9186, Fifty Years of Optical Sciences at The University of Arizona, 91860M (20 October 2014); https://doi.org/10.1117/12.2063904

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
4 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Reflectivity

Mirrors

Multilayers

Superlattices

X-rays

Chemical elements

Interfaces

Show All Keywords

Keywords/Phrases

Search In:

Publication Years