Complete shape measurement of micro parts by digital holography

S. Huferath-von Luepke; R. Klattenhoff; C. Dankwart; C. Falldorf; R. B. Bergmann

doi:10.1117/12.2063389

18 August 2014 Complete shape measurement of micro parts by digital holography

S. Huferath-von Luepke, R. Klattenhoff, C. Dankwart, C. Falldorf, R. B. Bergmann

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 920302 (2014) https://doi.org/10.1117/12.2063389
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Industry frequently demands fast and robust measurement techniques for the inline inspection of the full shape of objects in the micro range. We present a method for complete 360 degree measurement of the shape of a micro cup using digital holographic microscopy and show first results of sequential 360 degree measurement using different illumination and observation directions.

Citation Download Citation

S. Huferath-von Luepke, R. Klattenhoff, C. Dankwart, C. Falldorf, and R. B. Bergmann "Complete shape measurement of micro parts by digital holography", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920302 (18 August 2014); https://doi.org/10.1117/12.2063389

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