A sensitive optical probe for surface topography based on an optimized astigmatic method

Jingtao Dong; Gang Xiao; Jian Chen; Zhouling Wu

doi:10.1117/12.2062524

5 September 2014 A sensitive optical probe for surface topography based on an optimized astigmatic method

Jingtao Dong, Gang Xiao, Jian Chen, Zhouling Wu

Proceedings Volume 9205, Reflection, Scattering, and Diffraction from Surfaces IV; 920507 (2014) https://doi.org/10.1117/12.2062524
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Surface topography is required for many kinds of industrial products, and its applications keep increasing, making the need for adequate control of surfaces and an understanding of surface topography measurements more important than ever. In this paper, we presented a sensitive and cost-effective optical probe for surface topography. An astigmatic method used in the optical probe was optimized for submicron/nanometer resolution and monotonic characterization of focus error signal (FES). A home-made system based on this optical probe was also presented, and the measurement results of surface topography indicate great potential of applications in many industrial fields.

Citation Download Citation

Jingtao Dong, Gang Xiao, Jian Chen, and Zhouling Wu "A sensitive optical probe for surface topography based on an optimized astigmatic method", Proc. SPIE 9205, Reflection, Scattering, and Diffraction from Surfaces IV, 920507 (5 September 2014); https://doi.org/10.1117/12.2062524

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