The figure simulation of the polishing pad in the continuous polishing process

Haiyang Shan; Xueke Xu; Hongbo He; Shijie Liu; Chaoyang Wei; Kui Yi; Jianda Shao

doi:10.1117/12.2073492

22 September 2014 The figure simulation of the polishing pad in the continuous polishing process

Haiyang Shan, Xueke Xu, Hongbo He, Shijie Liu, Chaoyang Wei, Kui Yi, Jianda Shao

Proceedings Volume 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers; 92380G (2014) https://doi.org/10.1117/12.2073492
Event: Pacific-rim Laser Damage, 2014, Yokohama, Japan

Abstract

The figures of the polishing pad are of great significance for the figures of optical workpieces in the continuous polishing process. Three main factors which affect the figures of the pad, including the polishing pad creep deformation, the calibration plate grinding and the ambient change in temperature, are analyzed in this work. Processing parameters including the eccentricity between the polishing pad and the calibration plate, the calibration plate thickness, angular velocities of the pad are introduced in this analytic process. With this method, the figures of the polishing pad in the continuous polishing can be obtained. This work provides theoretical guidance for the deterministic processing of the continuous polishing process.

Citation Download Citation

Haiyang Shan, Xueke Xu, Hongbo He, Shijie Liu, Chaoyang Wei, Kui Yi, and Jianda Shao "The figure simulation of the polishing pad in the continuous polishing process", Proc. SPIE 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers, 92380G (22 September 2014); https://doi.org/10.1117/12.2073492

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