The maximum life expectancy for a micro-fabricated diaphragm

Ioan Călimănescu; Liviu-Constantin Stan; Viorica Popa

doi:10.1117/12.2069990

20 February 2015 The maximum life expectancy for a micro-fabricated diaphragm

Ioan Călimănescu, Liviu-Constantin Stan, Viorica Popa

Proceedings Volume 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII; 92582G (2015) https://doi.org/10.1117/12.2069990
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2014, 2014, Constanta, Romania

Abstract

Micro-fabricated diaphragms can be used to provide pumping action in microvalve and microfluidic applications. The functionality of the microdiaphragm in a wirelessly actuated micropump plays a major role in low–powered device actuation. In developing micropumps and their components, it is becoming an increasing trend to predict the performance before the prototype is fabricated. Because performance prediction allows for an accurate estimation of yield and lifetime, in addition to developing better understanding of the device while taking into account the details of the device structure and second order effects. Hence avoid potential pitfalls in the device operation in a practical environment. The goal of this research is to determine via FEA the life expectancy for a corrugated circular diaphragm made out of an aluminum alloy. The geometry of the diaphragm is given below being generated within SolidWorks 2010, all the calculations were made using Ansys 13TM . The sound design of a micropump is heavily depending on the lifetime expectancy of the working part of the device which is the diaphragm. This will be subjected on cyclic loading and the fatigue will limit the life of this part. Once the diaphragm is breaking, the micropump is no more able to fulfill its scope. Any micropump manufacturer will then be very concerned on the life expectancy from the fatigue point of view of the diaphragms. The diaphragm circular and corrugated and made of Al alloy, showed a very good behavior from the fatigue point of view, the maximum life expectancy being 1.9 years of continuous functioning with 100 cycles per second. This work showed an simple and forward application of FEA analysis methods in order to estimate the fatigue behavior of corrugated circular microdiaphragms.

Citation Download Citation

Ioan Călimănescu, Liviu-Constantin Stan, and Viorica Popa "The maximum life expectancy for a micro-fabricated diaphragm", Proc. SPIE 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92582G (20 February 2015); https://doi.org/10.1117/12.2069990

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KEYWORDS

Finite element methods

Safety

Aluminum

Microfabrication

Manufacturing

Microelectromechanical systems

Microfluidics

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