Principal and error analysis of mirror symmetry method in three-flat test

Yong Liu; Xu Liu; Hongzhen Jiang; Yuhang He; Huan Ren; Yi Yang; Lin Zhang; Zhendong Shi; Quan Yuan

doi:10.1117/12.2071921

3 December 2014 Principal and error analysis of mirror symmetry method in three-flat test

Yong Liu, Xu Liu, Hongzhen Jiang, Yuhang He, Huan Ren, Yi Yang, Lin Zhang, Zhendong Shi, Quan Yuan

Proceedings Volume 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors; 929710 (2014) https://doi.org/10.1117/12.2071921
Event: International Symposium on Optoelectronic Technology and Application 2014, 2014, Beijing, China

Abstract

Three-flat test can separate the reference surface error from the test part surface in the surface measurement by interferometry. The solution based on mirror symmetry of three-flat test is compact and highly accurate. In practice, the error will be introduced when the position of three flats are misalignment or the relative rotation angle are not accurate. The influence of rotation angle error are simulated and discussed. Then the experiment was carried out on three reference flats and the flat surface profiles were derived by mirror symmetry method. The experiment results show good agreement and the difference is in a nanometer level.

Citation Download Citation

Yong Liu, Xu Liu, Hongzhen Jiang, Yuhang He, Huan Ren, Yi Yang, Lin Zhang, Zhendong Shi, and Quan Yuan "Principal and error analysis of mirror symmetry method in three-flat test", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 929710 (3 December 2014); https://doi.org/10.1117/12.2071921

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