The remarkable discovery of high Tc superconducting ceramics[1] has been followed by intense efforts to realize their potential in the form of devices, films, and wires. A number of techniques have been shown to be effective for growing thin films of these superconductors including electron beam/thermal co-evaporation,[2-41 RF and DC sputtering, [5-8] laser [11-12] evaporation,[9-10] and spin-on/pyrolysis. Of all of these techniques, the e-beam/thermal co-evaporation methods have been shown to give the best electrical characteristics in Ba2YCu3O7 films, particularly with respect to the critical currents which have reached 106 A/cm2 at 77K. [6,13]
|