Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength

Yongfu Wen; Weijuan Qu; Haobo Cheng; Anand Asundi

doi:10.1117/12.2190197

17 July 2015 Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength

Yongfu Wen, Weijuan Qu, Haobo Cheng, Anand Asundi

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Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95242M (2015) https://doi.org/10.1117/12.2190197
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution.

Citation Download Citation

Yongfu Wen, Weijuan Qu, Haobo Cheng, and Anand Asundi "Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95242M (17 July 2015); https://doi.org/10.1117/12.2190197

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KEYWORDS

Digital holography

Holography

Microscopes

Holograms

Microelectromechanical systems

3D image processing

3D microstructuring

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