Paper
23 September 2015 Advanced optical monitoring system using a new developed low noise wideband spectrometer system
Alfons Zöller, Detlef Arhilger, Michael Boos, Harro Hagedorn
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Abstract
A newly developed wideband optical monitoring system is based on a fast triggered spectrometer with a high dynamic array detector with low signal noise. It is useful for fast in-situ transmittance measurements on the rotating substrate holder during the deposition. The spectra can be stored and used for reverse engineering analysis. Layer thickness control with monochromatic monitoring strategies can be applied by using a selected single wavelength from the array detector. The high dynamic detector supports the classical turning point monitoring as well as trigger-point cut-offs with online corrected end points. The basic system design and functionalities are described. The results of multilayer systems demonstrate the performance of the new developed monitoring system.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alfons Zöller, Detlef Arhilger, Michael Boos, and Harro Hagedorn "Advanced optical monitoring system using a new developed low noise wideband spectrometer system", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 962712 (23 September 2015); https://doi.org/10.1117/12.2191269
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Spectroscopy

Control systems

Glasses

Transmittance

Detector arrays

Signal detection

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