Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu; Amir Khabbazi; Travis Day; Andrew Brown; Luke A. Emmert; Joseph J. Talghader; Ella Field; Damon Kletecka; John Bellum; Dinesh Patel; Carmen S. Menoni; Wolfgang Rudolph

doi:10.1117/12.2196548

23 November 2015 Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, Wolfgang Rudolph

Author Affiliations +

Proceedings Volume 9632, Laser-Induced Damage in Optical Materials: 2015; 963215 (2015) https://doi.org/10.1117/12.2196548
Event: SPIE Laser Damage, 2015, Boulder, Colorado, United States

Abstract

The laser damage behavior of high quality coatings under nanosecond pulse illumination is controlled by statistically distributed defects, whose physical nature and defect mechanisms are still largely unknown. Defect densities are often retrieved by modeling the fluence dependence of the damage probability measured by traditional damage test (TDT) methods, based on ‘damage’ or ‘no damage’ observations. STEREO-LID (Spatio-TEmporally REsolved Optical LaserInduced Damage) allows the determination of the damage fluence (and intensity) in a single test by identifying the initiation of damage both temporally and spatially. The advantages of this test method over the TDT are discussed. In particular, its ability to retrieve detailed defect distribution functions is demonstrated by comparison of results from HfO₂ films prepared by ion-assisted electron beam evaporation, ion-beam sputtering, and atomic layer deposition.

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Yejia Xu, Amir Khabbazi, Travis Day, Andrew Brown, Luke A. Emmert, Joseph J. Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen S. Menoni, and Wolfgang Rudolph "Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films", Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963215 (23 November 2015); https://doi.org/10.1117/12.2196548

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