Fine figure correction and other applications using novel MRF fluid designed for ultra-low roughness

Chris Maloney; Eric S. Oswald; Paul Dumas

doi:10.1117/12.2195668

11 October 2015 Fine figure correction and other applications using novel MRF fluid designed for ultra-low roughness

Chris Maloney, Eric S. Oswald, Paul Dumas

Proceedings Volume 9633, Optifab 2015; 96330G (2015) https://doi.org/10.1117/12.2195668
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

An increasing number of technologies require ultra-low roughness (ULR) surfaces. Magnetorheological Finishing (MRF) is one of the options for meeting the roughness specifications for high-energy laser, EUV and X-ray applications. A novel MRF fluid, called C30, has been developed to finish surfaces to ULR. This novel MRF fluid is able to achieve <1.5Å RMS roughness on fused silica and other materials, but has a lower material removal rate with respect to other MRF fluids. As a result of these properties, C30 can also be used for applications in addition to finishing ULR surfaces. These applications include fine figure correction, figure correcting extremely soft materials and removing cosmetic defects. The effectiveness of these new applications is explored through experimental data. The low removal rate of C30 gives MRF the capability to fine figure correct low amplitude errors that are usually difficult to correct with higher removal rate fluids. The ability to figure correct extremely soft materials opens up MRF to a new realm of materials that are difficult to polish. C30 also offers the ability to remove cosmetic defects that often lead to failure during visual quality inspections. These new applications for C30 expand the niche in which MRF is typically used for.

Citation Download Citation

Chris Maloney, Eric S. Oswald, and Paul Dumas "Fine figure correction and other applications using novel MRF fluid designed for ultra-low roughness", Proc. SPIE 9633, Optifab 2015, 96330G (11 October 2015); https://doi.org/10.1117/12.2195668

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