Coherent Heterodyne Scatterometer

L. Z. Gacusan; S L. Kwiatkowski; B J. Sullivan; J J Snyder

doi:10.1117/12.948102

5 April 1989 Coherent Heterodyne Scatterometer

L. Z. Gacusan, S L. Kwiatkowski, B J. Sullivan, J J Snyder

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948102
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

An instrument has been developed that uses coherent optical heterodyne detection to measure the magnitude of the bidirectional scattering distribution function (BSDF). This instrument offers large dynamic range, high angular resolution and high sensitivity.

Citation Download Citation

L. Z. Gacusan, S L. Kwiatkowski, B J. Sullivan, and J J Snyder "Coherent Heterodyne Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948102

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