Fabrication of the blazed convex grating by holographic ion beam etching

Quan Liu; Yu Cheng; Fei Gao; Yang Zhou; Jianhong Wu

doi:10.1117/12.2199817

15 October 2015 Fabrication of the blazed convex grating by holographic ion beam etching

Quan Liu, Yu Cheng, Fei Gao, Yang Zhou, Jianhong Wu

Proceedings Volume 9672, AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications; 96720Q (2015) https://doi.org/10.1117/12.2199817
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

The blazed convex grating is one of the key elements in Offner imaging spectrometers. In this paper the diffraction characteristics of the blazed convex grating is investigated by using rigorous coupled-wave analysis. The results indicate that within the wavelength from 1 μm to 2.5 μm, the first-order diffraction efficiency can be over 40% through controlling the blazed angle of blazed grating. Furthermore, when the blazed angle is 3.9 degree, the first-order diffraction efficiency is still over 40% with the vertex angles between 120 degree and 150 degree. The blazed convex grating with the spatial frequency of 73 L/mm in the center will be fabricated by holographic lithography-ion beam etching.

Citation Download Citation

Quan Liu, Yu Cheng, Fei Gao, Yang Zhou, and Jianhong Wu "Fabrication of the blazed convex grating by holographic ion beam etching", Proc. SPIE 9672, AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications, 96720Q (15 October 2015); https://doi.org/10.1117/12.2199817

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